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DC sputtering of Tio2...

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aaron...
Posted: Sun Jul 12, 2009 7:38 am
Guest
HI everyone,

I have a denton vacuum desk II its meant for gold sputter and have
cold sputter head with DC 2kv 150mA power supply, I know i cannot
sputter ceramic type of targets like Sio Tio Tio2 Sio2. Can I add RF
power supply to archive to sputter ceramic non conductive materials or
do some modification on power supply. What is the specification of
power supply will be to sputter.
Any help will be much appreciated.

Thanks,
Aaron
 
 
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