| |
 |
|
|
Science Forum Index » Materials Forum » Coating for aluminum vacuum chamber
Page 1 of 1
|
| Author |
Message |
| Guest |
 Posted: Tue Jan 15, 2008 4:55 am |
|
|
|
|
Does anyone have tried and experienced a good coating for aluminum
vacuum chamber? In fact, I am looking for a corrosive resistant,
abrasive resistant coating that would not cause any outgassing or
water adsortion as anodized aluminum.
The chamber is submitted to 10-3 torr vacuum and involves the use of
moisture for a specific process. Relative humidity is the primary key
for process repeatability. Anodized layer failed in this situation
since it reacts differently depending of the exposed environmentr :
temperature, saturation level, outside RH% ...
Thanks,
JM |
|
|
| Back to top |
|
| Mark Thorson |
| Posted: Tue Jan 15, 2008 10:26 pm |
|
|
|
Guest
|
jmvallieres@tso3.com wrote:
Quote:
Does anyone have tried and experienced a good coating for aluminum
vacuum chamber? In fact, I am looking for a corrosive resistant,
abrasive resistant coating that would not cause any outgassing or
water adsortion as anodized aluminum.
I haven't used it, but this sounds like an application
for Parylene.
http://en.wikipedia.org/wiki/Parylene |
|
|
| Back to top |
|
| Guest |
| Posted: Wed Jan 16, 2008 5:43 am |
|
|
|
|
On 15 jan, 21:26, Mark Thorson <nos...@sonic.net> wrote:
Quote: jmvallie...@tso3.com wrote:
Does anyone have tried and experienced a good coating for aluminum
vacuum chamber? In fact, I am looking for a corrosive resistant,
abrasive resistant coating that would not cause any outgassing or
water adsortion as anodized aluminum.
I haven't used it, but this sounds like an application
for Parylene.
Any other suggestions, Parylene is not Abrasive Resistant! |
|
|
| Back to top |
|
| Phil Hobbs |
| Posted: Wed Jan 16, 2008 1:17 pm |
|
|
|
Guest
|
jmvallieres@tso3.com wrote:
Quote: On 15 jan, 21:26, Mark Thorson <nos...@sonic.net> wrote:
jmvallie...@tso3.com wrote:
Does anyone have tried and experienced a good coating for aluminum
vacuum chamber? In fact, I am looking for a corrosive resistant,
abrasive resistant coating that would not cause any outgassing or
water adsortion as anodized aluminum.
I haven't used it, but this sounds like an application
for Parylene.
Any other suggestions, Parylene is not Abrasive Resistant!
What are you planning to do to it? Why is abrasion resistance
important in a vacuum chamber?
If you just want to be able to get films off the walls of your
evaporator, then use (a) aluminum foil shields that you can throw away,
with a mirror inside the chamber for direct viewing, or (alternatively)
some Bell Bright spray coating (which you can get from Duniway
Stockroom, iirc).
If this is something more involved, e.g. a RIE chamber or (horrors) UHV,
then I don't know--all the UHV stuff I've seen has been stainless steel.
Cheers,
Phil Hobbs |
|
|
| Back to top |
|
| |
|
Page 1 of 1
All times are GMT - 5 Hours
The time now is Fri Sep 05, 2008 1:43 am
|
|